By Steve P. Beeby,Graham Ensel,Michael Kraft
This new source explores the entire significant components of mechanical microsensors and takes an extremely shut examine strain and inertial sensors. Engineers in and academia can faucet into present and destiny industry developments in such key functions parts for mechanical microsensors as strength and torque, stream in microfluidics, and displacement. a radical creation to actual sensors, MEMS, and the homes of silicon brings you on top of things with the state-of-the-art of this groundbreaking technology.
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Extra info for MEMS Mechanical Sensors (Mems--Microelectromechanical Systems Series)
MEMS Mechanical Sensors (Mems--Microelectromechanical Systems Series) by Steve P. Beeby,Graham Ensel,Michael Kraft