Norman G. Einspruch,Graydon B. Larrabee's Materials and Process Characterization: 6 (VLSI Electronics PDF

By Norman G. Einspruch,Graydon B. Larrabee

VLSI Electronics: Microstructure technological know-how, quantity 6: fabrics and technique Characterization addresses the matter of ways to use a large diversity of subtle fabrics characterization instruments to fabrics and approaches used for improvement and construction of very huge scale integration (VLSI) electronics.

This publication discusses many of the characterization innovations, corresponding to Auger spectroscopy, secondary ion mass spectroscopy, X-ray topography, transmission electron microscopy, and spreading resistance. The systematic method of the applied sciences of VLSI digital fabrics and equipment manufacture also are considered.

This quantity is helpful to fabrics scientists, chemists, and engineers who're commissioned with the accountability of constructing and imposing the construction of fabrics and units to help the VLSI era.

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Materials and Process Characterization: 6 (VLSI Electronics Microstructure Science) by Norman G. Einspruch,Graydon B. Larrabee


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